1.High abrasion resistance, high surface accuracy
2.Excellent corrosion resitance, high hardness
3.Antioxidant with long service life
4. High temperature resistance
Inquiry
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Pin Tray
SiC pin tray
Application:
· SiC pin tray for ICP etching process in LED industry can replace the tray of usual pocket types.
Feature requirements:
1. Excellent thermal conductivity
2. Resistance to plasma bombardment
3. Good temperature uniformity
1. Exclusive patent design, obtained ROC patent certificate:
New No. M555559-New name: wafer carrier
2. Assist customers improvement in process
3. Highly cost-performance ratio and high competitive
4. Improve the homogeneity of each small partial area in the wafer
5. Reduce the difference of process results between wafers in the same carrier
6. Lasting life is quadruple than usual pocket types, which can greatly save the use cost of the plate
We have advanced producing equipments of SiC Plate and good workmanship and gradually explore some new design. All overseas partners are welcome to negotiate and cooperate with us.
Why is better than others:
1. Available in various specifications, also providing customized services
2. Stable quality and fast delivery
3. High cost-performance ratio and competitive
4. Extensive experience in making trays
