Silicon carbide sic wafer chucks for semiconductor machines
Silicon Infiltrated SiSiC and Reaction-bonded RBSiC is a very high strength material that is often used for support beams for kiln structures or kiln-car systems. The beams are lightweight and remain straight after prolonged use. It can be used up to 1380ºC (2500ºF).

1380C temperature resistant ceramic sic loading beam for household ceramics

are mainly used for load-bearing structure frame for tunnel kiln,shuttle kiln and many other kilns.The characteristics of sic beam are high loading capacity under high temperature,no bending deformation with long service life,high thermal conductivity,save energy consumption obviously without increasing the weight of the kiln car. Sic beam is the ideal kiln furniture for sanitary ware,domestic ceramic and other industries.Recently we Sunshine Ceramics have developed a new style frame type energy-saving sic beam depending on customer usage,provide customers the better energy-saving solution.Our company has transformed hundreds of kiln cars for domestic and overseas customers,and has created large profits for our customers.


Characteristics:

Max temperature tolerance 1380 degree
Excellent oxidation and corrosion resistance
High thermal conductivity and shock resistance
High mechanical strength and abrasion resistance


Relevant Recommendation:
Silicon Nitride Ceramics
Oxide bonded SiC (OSIC)
Recrystallizde SiC (Re-SiC)
Reaction Bonded SiC (SiSiC)

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Description

The reaction sintered silicon carbide cantilever paddle is a key component of the semiconductor wafer loading system. The cantilever paddle has stable performance, does not deform in high-temperature environments, and has a large wafer loading capacity. It is suitable for robot automatic loading and handling systems. Since the cross-section of the cantilever paddle produced by Sunshine is stable and not deformed, it is possible to use the existing furnace tube to prepare larger wafers. The coefficient of thermal expansion of the Sunshine cantilever propeller is similar to that of the LPCVD coating. It is applied to LPCVD, which greatly extends the maintenance and cleaning cycle and greatly reduces pollutants.

Application of SIC Cantilever Paddle

Sic cantilever paddle is being used in the diffusion coating furnace of the photovoltaic industry for coating monocrystalline and polycrystalline silicon wafers. Its characteristic enables it to withstand high temperature and corrosion, giving it a long life span.

The sic cantilever paddle delivers sic boats / quartz boats which carry silicon wafers into the high temperature diffusion coating furnace tube. 

The length of our sic cantilever paddle ranges from 1500  to  3600mm. Sic cantilever  paddle's dimension can be tailor-made.

Characteristic:

1.High temperature tolerance 
2.Corrosion resistance 
3.Oxidation resistance 
4.High thermal conductivity

 

 


Property:

Superior high temperature resistance,wear resistance and oxidation resistance.

Excellent straightness,less than 1‰.

High uniformly distributed loading capacity,more than 4997 kg.m/L.

OEM accepted.

Easy to install.

Various shape accepted,Germany imported technology and materials.

Longer service life ( about 5 times more than that of alumina ceramic and 6 times more than that of polyurethane). 

 

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Contact us
Tel: +86-15610293179
Fax: +86-13336368602
ADD: Fangzi,Weifang,Shandong,China
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