Inquiry
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Sic cantilever paddle is being used in the diffusion coating furnace of the photovoltaic industry for coating monocrystalline and polycrystalline silicon wafers. Its characteristic enables it to withstand high temperature and corrosion, giving it a long life span.
The sic cantilever paddle delivers sic boats / quartz boats which carry silicon wafers into the high temperature diffusion coating furnace tube.
The length of our sic cantilever paddle ranges from 1500 to 3600mm. Sic cantilever paddle's dimension can be tailor-made.
Characteristic:
1.High temperature tolerance
2.Corrosion resistance
3.Oxidation resistance
4.High thermal conductivity
The reaction sintered silicon carbide cantilever paddle is a key component of the semiconductor wafer loading system. The cantilever paddle has stable performance, does not deform in high-temperature environments, and has a large wafer loading capacity. It is suitable for robot automatic loading and handling systems. Since the cross-section of the cantilever paddle produced by Newthink is stable and not deformed, it is possible to use the existing furnace tube to prepare larger wafers. The coefficient of thermal expansion of the cantilever propeller is similar to that of the LPCVD coating. It is applied to LPCVD, which greatly extends the maintenance and cleaning cycle and greatly reduces pollutants.
